AMAT PRODUCER-SE SABPSG (S/N : 415430)

  • MANUFACTURE : AMAT
  • MODEL : PRODUCER-SE
  • VINTAGE : 2007
  • SERIAL NO : 415430
  • WAFER SIZE : 300mm
  • CATEGORY : CVD
  • STATUS : SELL

        [DESCRIPTION]      

1ProcessSA-BPSG
2ChambersCH#A : SABPSG  /  CH#B : SABPSG  /  CH#C : SABPSG
3RPSMKS FI 80131
4Ozone GeneratorASTEX
5ComputerSERVER : X306 & VMI 7325
6FI RobotKawasaki 2Fixed Robot
7Buffer RobotVHP
8Foreline3inch GATE (MKS Throttle)


        [PHOTO]     

                         

          



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