AMAT PRODUCER-SE SABPSG (S/N : 413794)

  • MANUFACTURE : AMAT
  • MODEL : PRODUCER-SE
  • VINTAGE : 2006
  • SERIAL NO : 413794
  • WAFER SIZE : 300mm
  • CATEGORY : CVD
  • STATUS : SELL

      [DESCRIPTION]      

1ProcessSA-BPSG
2ChambersCH#A : SABPSG  /  CH#B : SABPSG  /  CH#C : SABPSG
3RPSNPP
4Ozone GeneratorAX-8407A
5ComputerSERVER :  306  &   CPCI 7325
6FI RobotKawasaki 2Fixed Robot
7Foreline3Inch Foreline Type (GATE : NC  /   TV : MKS683)


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