AMAT Centura AP ULTIMA-X HDP (S/N:414185)

  • MANUFACTURE : AMAT
  • MODEL : ULTIMA-X
  • VINTAGE : 2007
  • SERIAL NO : 414185
  • WAFER SIZE : 300mm
  • CATEGORY : CVD
  • STATUS : SELL

      [DESCRIPTION]        

1ProcessHDP CVD
2ChambersCH#A : HDP , CH#B : HDP, CH#D : HDP
3Server TypeSERVE
4FI&FE  /    RTIBM X306M  /  CPCI 7325
5FI Robot2Fixed Kawasaki
6RF GeneratorSPECTRUM
7Turbo PumpShimadzu XH 3603
8RPSMKS (400kHz   max 6,000W)

   

        [PHOTO]   

                      

             

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