AMAT Centura AP ULTIMA-X (S/N : 410548)
- MANUFACTURE : AMAT
- MODEL : ULTIMA-X
- VINTAGE : 2006
- SERIAL NO : 410548
- WAFER SIZE : 300mm
- CATEGORY : CVD
- STATUS : SELL
[DESCRIPTION]
| 1 | Process | HDP CVD |
| 2 | Chambers | CH#A : HDP, CH#B : HDP, CH#D : HDP |
| 3 | Computer | SERVE (IBM X306 / CPCI 7325) |
| 4 | FI Robot | 2Fixed Kawasaki |
| 5 | RF Generator | SPECTRUM (TOP/SIDE/BIAS) |
| 6 | Turbo Pump | SHIMADZU HX 3603 |
| 7 | RPS | MKS (400kHz max 6,000W) |
| 8 | CHILLER | SMC THERMO CHILLER |
[PHOTO]
