AMAT PRODUCER-SE SABPSG (S/N : 415430)
- MANUFACTURE : AMAT
- MODEL : PRODUCER-SE
- VINTAGE : 2007
- SERIAL NO : 415430
- WAFER SIZE : 300mm
- CATEGORY : CVD
- STATUS : SELL
[DESCRIPTION]
| 1 | Process | SA-BPSG |
| 2 | Chambers | CH#A : SABPSG / CH#B : SABPSG / CH#C : SABPSG |
| 3 | RPS | MKS FI 80131 |
| 4 | Ozone Generator | ASTEX |
| 5 | Computer | SERVER : X306 & VMI 7325 |
| 6 | FI Robot | Kawasaki 2Fixed Robot |
| 7 | Buffer Robot | VHP |
| 8 | Foreline | 3inch GATE (MKS Throttle) |
[PHOTO]
