AMAT PRODUCER-SE TEOS (S/N : 404103)

8 Sep 2020
  • MANUFACTURE : AMAT
  • MODEL : PRODUCER-SE
  • VINTAGE : 2003
  • SERIAL NO : 404103
  • WAFER SIZE : 300mm
  • CATEGORY : CVD
  • STATUS : SELL

        [DESCRIPTION]          

1ProcessPE-TEOS
2ChambersCH#A : TEOS  /  CH#B : TEOS  /  CH#C : NONE
3RPSMKS  FI 20620
4RF GeneratorHF RFG 3000  /   PDX-900-2V
5ComputerSERVER : X306 & VMI 7325
6FI RobotKawasaki 2Fixed Robot
7Buffer RobotVHP
8Foreline3Inch SMC ( MKS Throttle)


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