AMAT PRODUCER-SE TEOS (S/N : 404103)
- MANUFACTURE : AMAT
- MODEL : PRODUCER-SE
- VINTAGE : 2003
- SERIAL NO : 404103
- WAFER SIZE : 300mm
- CATEGORY : CVD
- STATUS : SELL
[DESCRIPTION]
| 1 | Process | PE-TEOS |
| 2 | Chambers | CH#A : TEOS / CH#B : TEOS / CH#C : NONE |
| 3 | RPS | MKS FI 20620 |
| 4 | RF Generator | HF RFG 3000 / PDX-900-2V |
| 5 | Computer | SERVER : X306 & VMI 7325 |
| 6 | FI Robot | Kawasaki 2Fixed Robot |
| 7 | Buffer Robot | VHP |
| 8 | Foreline | 3Inch SMC ( MKS Throttle) |
[PHOTO]
