AMAT PRODUCER-SE SABPSG (S/N : 413794)
- MANUFACTURE : AMAT
- MODEL : PRODUCER-SE
- VINTAGE : 2006
- SERIAL NO : 413794
- WAFER SIZE : 300mm
- CATEGORY : CVD
- STATUS : SELL
[DESCRIPTION]
| 1 | Process | SA-BPSG |
| 2 | Chambers | CH#A : SABPSG / CH#B : SABPSG / CH#C : SABPSG |
| 3 | RPS | NPP |
| 4 | Ozone Generator | AX-8407A |
| 5 | Computer | SERVER : 306 & CPCI 7325 |
| 6 | FI Robot | Kawasaki 2Fixed Robot |
| 7 | Foreline | 3Inch Foreline Type (GATE : NC / TV : MKS683) |
[PHOTO]
