AMAT PRODUCRE-GT FCVD & SACVD (S/N : 423371)
- MANUFACTURE : AMAT
- MODEL : PRODUCER-GT
- VINTAGE : 2011
- SERIAL NO : 423371
- WAFER SIZE : 300mm
- CATEGORY : CVD
- STATUS : SELL
[DESCRIPTION]
| 1 | Process | FCVD & SACVD |
| 2 | Chambers | CH#A&C : ETERNA FCVD / CH#B : SACVD |
| 3 | RPS | 6L : AX 7685 / FI 80131 |
| 4 | Heater | AL Heater / NGK Ceramic Heater |
| 5 | FORELINE | 4Inch Gate + MKS TV |
| 6 | Robot | FX Robot |
| 7 | WIP Delivery Type | OHT WIP DELIVERY |
| 8 | Server Type | FI & FE : Supermicro 3.0 / RT : Supermicro 3.0 |
[PHOTO]
