AMAT Centura AP ULTIMA-X HDP (S/N:414185)
- MANUFACTURE : AMAT
- MODEL : ULTIMA-X
- VINTAGE : 2007
- SERIAL NO : 414185
- WAFER SIZE : 300mm
- CATEGORY : CVD
- STATUS : SELL
[DESCRIPTION]
| 1 | Process | HDP CVD |
| 2 | Chambers | CH#A : HDP , CH#B : HDP, CH#D : HDP |
| 3 | Server Type | SERVE |
| 4 | FI&FE / RT | IBM X306M / CPCI 7325 |
| 5 | FI Robot | 2Fixed Kawasaki |
| 6 | RF Generator | SPECTRUM |
| 7 | Turbo Pump | Shimadzu XH 3603 |
| 8 | RPS | MKS (400kHz max 6,000W) |
[PHOTO]
