AMAT PRODUCER-SE SA BPSG (S/N : 418815)
- MANUFACTURE : AMAT
- MODEL : PRODUCER-SE
- VINTAGE : 2008
- SERIAL NO : 418815
- WAFER SIZE : 300mm
- CATEGORY : CVD
- STATUS : SELL
[DESCRIPTION]
| 1 | Process | SABPSG |
| 2 | Chambers | CH#A TWIN : SABPSG / CH#B&C : NONE |
| 3 | RPS | Single ASTRON Ex |
| 4 | Ozone Generator | AX-8407A |
| 5 | Heat Exchanger | SMC H2000 |
| 6 | O3 Rack Chiller | MX-500 |
| 7 | Computer | 306M & CPCI7325 |
[PHOTO]
